Chamber furnace RLA-4106-V

annealingvacuum

Vacuum load-lock capability improves throughput. Supports various wafers including Si, GaN, and SiC. Features Vacuum load-lock is equipped as standard on the chamber and transport unit, for high throughput. Includes an automated susceptor transfer function for SiC and GaN wafers. Halogen lamps are installed in both an upper and lower cross. 6 zone control allows easy control of the power ratio for each zone. Non-contact measurement of workpiece temperature is performed using radiative thermometers, and feedback control is possible. This is production equipment that uses multiple halogen lamps arranged in an upper and lower cross as the heat source, and is intended for rapid, high-precision annealing of wafers. The use of a newly developed vacuum transport platform enables workpiece transport and treatment in an ultra-low oxygen atmosphere.