Cabinet furnace VF-5900

heat treatmentoxidationelectric

This furnace is a heat treatment system for silicon wafer, IGBT, polyimide and thin wafer oxidation, diffusion and CVD. As our flagship model, this furnace is equipped with a large-capacity stocker and features a short cycle time. Features Large batch, Max 100 wafers batch processing Max 16 FOUP stocks Excellent temperature control from low to midium high temperature range by use of LGO heater High-speed wafer transfer by use of single/five wafers handling robot Equipped with operator friendly high performance control system This large-batch mass-production type vertical diffusion furnace can process a maximum of 100 wafers (300-mm / 12-inch) or 16 FOUPs a batch. An LGO heater is used for superior temperature characteristics from low temperatures to medium high temperatures. In addition to silicon wafers, the furnace is suitable for IGBT, polyimide, thin wafer and other material heat treatments.