Best-seller clean ovens for liquid crystal (LCD) and organic EL (OLED)!
Supporting glass sizes up to 10th generation, these ovens provide high productivity and a high clean factor, and enables zero substrate damage. They can also counter the sublimates generated by post-baking.
Features
High productivity
High clean factor and zero substrate damage
High operating rate
Energy savings
Support for a variety of layouts
Support for all kinds of substrate operations
Can also counter sublimates.
High productivity
The rack pitch inside the oven has been reduced, and the rack structure is specially designed for each processing application (patent acquired).
It provides high storage efficiency together with excellent space efficiency and energy efficiency. It is also capable of flexible operation such as limiting the number of ovens used according to the production quantity.
High clean factor and zero substrate damage
Our original shutter structure (patent acquired) eliminates the need to move substrates inside the oven. As a result, there is no substrate damage or particles resulting from movement.
High operating rate
Because the equipment structure is simple, there is little concern about equipment stops caused by mechanical trouble, and the equipment can be used with confidence.
Energy savings
The oven interior vacuum control and high thermal insulating structure reduce the amount of dissipated heat.
Newly developed waste heat recovery equipment (patent pending) can improve effective energy use.