Valves handle applications in semiconductor and other processing, and are used most often to isolate pumps and sample entry locks from HV or UHV work chambers.
Features
KF, ISO & ASA/ANSI Flanged: Operate in the atmosphere to 10-9 torr pressure range, bakeable up to 150° C (in the open position)
General purpose Electropolished Stainless Steel
Vacuum brazed at 1,100° C to ensure reliable operation at HV and UHV pressures
Provide high conductance within a compact design
Shock-free operation with minimum vibration
100,000-cycle service before requiring maintenance
Available in manual or pneumatic operation
Pneumatic valves close or remain closed in the event of power loss or loss of air pressure
All 1.5" flange O.D. and larger models incorporate magnetic REED switches for position indication
Pneumatic valves feature a 120VAC solenoid operator at no extra charge (other voltages, both AC and DC, available on request)
NOTE:
For ease of maintenance, the carriage assembly can be removed from the body without requiring removal of the valve from the system. Please contact us for options such as roughing ports or valves that remain open in the event of power failure.
Manual Gate valves with port ID's 3" and smaller. Do not have crank handle.