Used with cryopumps, turbomolecular pumps, and ion pumps; ideal for applications requiring clean, high-vacuum, low-maintenance valves.
Rugged valves share the design features of the standard valves
Enhanced to withstand 1 million+ cycles before requiring service
Bellows reinforced for longer operating life
All moving joints are made of 304 stainless steel, hardened to increase durability, reduce particulate generation, and provide smoother actuation
Maintain closed status in the event of a power failure
Feature fluorocarbon seals (bakeable to 150° C) and electropneumatic operators
Body-mounted solenoid with manual override provides easy control
120 VAC Solenoid incorporates speed controls for smoother actuation
1.5" to 12.0" models are equipped with magnetic reed switches for position indicator
NOTE: Available options include larger sizes, microswitches, custom flanges, and latching-type solenoids. Please call if ordering options.