Bakeable leak valves are used to control the flow of gas into a vacuum system from an external source. A soft metal pad is compressed against a harder metal seat, creating the necessary seal for precise gas flow control.
Available in two different series
Each series utilizes different types of sealing materials tailored for specific applications
Typical applications include argon processing, sputtering, system purging, precision gas control, and laser back-filling
LVM Series
Stainless steel and copper alloy construction for long life
Inlet pressure to 10 bar maximum
Operating pressure from 1 bar to 10-11 mbar
Precision control mechanism
Adjustable graduated indexing
Bakeable to 450° C (open)/ 250 ° C (closed)
Minimum control backlash
User serviceable