Profile and Roughness tester
Features & Advantges:
1.Combined with Profile and Rougness detector in one machine
2.Digital Profile detector
3.Real-time Profile track display
4.Standard roughness detector without nosepiece
Technical data:
Model - MPR100
Measuring range - X axis - 100~220mm
- Z axis - 320~620mm
- Z1 axis - C:0~±30mm/R:±420μm
Profile accuracy - Z1 linear - ±(1.5+|0.2H|)μm
- Arc - ±(2+R/8)μm
- Angle - ±2′
- Straightness - 0.8μm/100mm
Roughness accuracy - Linear - ±(7nm+3.5%)μm
- Residual noise - ≤0.025μm
- Repeatability - 1δ≤2nm
- Cutoff wavelength - 0.025、0.08、0.25、0.8、2.5、8mm
- Evaluation length - λcX2、3、4、5、6、7
Driving speed - X axis: 0.1-10mm/s
- Z axis: 0.5-10mm/s