annealing, curing, drying, surface coating
Surface modification of wafer in protective gas atmosphere
Other possible applications are:
Coating processes in electronics and semiconductor industry
PRODUCT SPECIFICATIONS
The most important characteristics:
2-zone electrically heated
Clean room class 100
Residual oxygen measurement
Fast cooling
Stainless steel (1.4301) chamber, electro polished
Gas feeding device (Ar, N2)
Heated by tubular heating element
Heating power approx... 5 kW
Temperature accuracy +/-3k
Gas-circulation
We make it possible:
Linn High Therm is specialized in adapting its products to customer’s requirements. Please let us know if you need any modifications. We will do everything to satisfy your wishes.
Possible Standardized Options
Different controller systems
Emergency water cooling
Process Guiding Software
Circulation cooler
Burning-off device with flame supervision
Safety package