Chamber furnace KH-64-S
tubularannealingdrying

Chamber furnace - KH-64-S - Linn High Therm - tubular / annealing / drying
Chamber furnace - KH-64-S - Linn High Therm - tubular / annealing / drying
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Characteristics

Configuration
chamber, tubular
Function
annealing, drying, curing
Heat source
electric resistance
Atmosphere
controlled atmosphere, air circulating
Other characteristics
continuous, stainless steel
Maximum temperature

260 °C
(500 °F)

Capacity

64 l
(16.91 gal)

Description

annealing, curing, drying, surface coating Surface modification of wafer in protective gas atmosphere Other possible applications are: Coating processes in electronics and semiconductor industry PRODUCT SPECIFICATIONS The most important characteristics: 2-zone electrically heated Clean room class 100 Residual oxygen measurement Fast cooling Stainless steel (1.4301) chamber, electro polished Gas feeding device (Ar, N2) Heated by tubular heating element Heating power approx... 5 kW Temperature accuracy +/-3k Gas-circulation We make it possible: Linn High Therm is specialized in adapting its products to customer’s requirements. Please let us know if you need any modifications. We will do everything to satisfy your wishes. Possible Standardized Options Different controller systems Emergency water cooling Process Guiding Software Circulation cooler Burning-off device with flame supervision Safety package

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*Prices are pre-tax. They exclude delivery charges and customs duties and do not include additional charges for installation or activation options. Prices are indicative only and may vary by country, with changes to the cost of raw materials and exchange rates.