crystal growing
For Physical Vapour Transport (PVT) growth of bulk SiC single crystals after the modified Lely method
Other application could be: Synthesis of high-purity SiC raw material
PRODUCT SPECIFICATIONS
Most important characteristics
Induction furnace, top-loader design
4” SiC bulk crystal growth
MF heating power 30 kW
Working frequency 8-10 kHz
Processing gases Nitrogen, Argon, Hydrogen, partial pressure operation 5 – 950 mbar
Vacuum/gastight chamber by water-cooled double-glass tube setup
Vacuum pump system for vacuum 2 x 10-5 mbar with turbomolecular pump (685 l/s)
High-purity graphite felt insulation (halogen-purified)
We make it possible:
Linn High Therm is specialized in adapting its products to customer’s requirements. Please let us know if you need any modifications. We will do everything to satisfy your wishes.
Possible standardized options
Crucible rotation and displacement
Crucible bottom pyrometer
Emergency water cooling
Process Guiding Software
Bottom-loader design
Circulation cooling unit
Crystal growth training by renowned German research institute