Silicon polishing machine PM6

sheetfor semiconductorslapping

The PM6 is the newest addition to Logitech Ltd’s wide range of precision lapping & polishing systems. The bench-top, research & development scale machine reproduces processing results typically found on production scale equipment. Highly flexible in use, the PM6 allows you to work with many different materials; including Gallium Arsenide, Silicon, Rock and Soils. The PM6 machine is used extensively in: The preparation of Geological Thin Sections: i.e. Rock lapping system The preparation of Semiconductor Materials i.e. Polishing silicon wafers Designed as a single workstation machine, the PM6 has dual abrasive feed cylinders with metered delivery from peristaltic pumps and come with optional automatic plate flatness control. Automatic Plate Flatness (Optional) The automatic plate flatness control system continually monitors the plate shape and automatically corrects any deviations from the pre-set shape. This removes the need to recondition the plate before processing, maintaining the shape indefinitely to within 1 micron of the operator’s target. This can be flat, concave or convex to a precise degree. The ease with which the value can be set provides in operator time and delivers great sample output. The PM6 system is made from aluminium and rigid polyurethane to withstand the most rigorous lapping and polishing environments. All functions are controlled from the Graphical User Interface (GUI). The PM6 is fully Bluetooth enabled and can provide real time data feedback which can be extracted through the USB port for external data analysis. Key Features Process up to 100mm/4″ wafers Up to 100rpm plate speed facilitating faster lapping rates