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Incremental linear encoder BS78opticalnon-contactexposed
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Characteristics
- Type
- incremental
- Technology
- optical
- Construction
- non-contact, exposed
- Output signal
- analog, digital, sine wave
- Protection level
- non-magnetic
- Applications
- industrial, for linear motors
- Other characteristics
- compact, high-accuracy, high-resolution, high-speed, glass scale
- Length
Max.: 420 mm
(16.535 in)Min.: 40 mm
(1.575 in)- Resolution
Max.: 0.1 µm
Min.: 0.01 µm
- Linear encoder speed
Max.: 400 mm/s
Min.: 0 mm/s
- Process temperature
Max.: 30 °C
(86 °F)Min.: 10 °C
(50 °F)
Description
High-speed and high-resolution, while maintaining stable, ultraprecision measuring. Ideal for precision stages, semiconductor inspection/manufacturing systems, and ultraprecision processing machines.
High-resolution scale with signal pitch of approx. 138 nm, outperforming light wave interferometer systems
High stability, unaffected by humidity, air pressure and air disturbances
Reference point accuracy: ±0.1µm
Non-contact design eliminates return error.
Measuring length: 9 types (-R/-RS)
Measuring length: 10 types (-N/-NS)
Special non-magnetic and vacuum-compatible models available
Using low expansion glass: -0.7 x10-6 °C (measuring length: 10 to 420mm)
Resolution: 2.1 pm
Catalogs
Laserscale General Catalogue
16 Pages
Other Magnescale Europe GmbH products
Linear encoder Laserscale
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*Prices are pre-tax. They exclude delivery charges and customs duties and do not include additional charges for installation or activation options. Prices are indicative only and may vary by country, with changes to the cost of raw materials and exchange rates.