Incremental linear encoder BH25 series

opticalnon-contactexposed

High-accuracy, reflective Laserscale with signal pitch of 250 nm. Ideal for low-profile stages, semiconductor back-end processing equipment and precision microscopes Signal pitch : 250 nm High accuracy : ±1 µm / 420 mm High response speed : 1,800 mm/s Maximum resolution : 3.8 pm Available : with/without reference point Completely non-contact design : Return error is theoretically eliminated. Scale : ZERO glass / alkali-free glass Thin head with thickness of 12 mm Supporting various resolutions and output modes (Depending on an interpolator such as BD96 or BD700) Special vacuum-compatible models available