Incremental linear encoder BH25 seriesopticalnon-contactexposed
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Characteristics
- Type
- incremental
- Technology
- optical
- Construction
- non-contact, exposed
- Output signal
- analog, digital, sine wave, RS-422
- Other characteristics
- compact, high-accuracy, high-resolution, high-speed, glass scale, with external conversion circuitry
- Resolution
Min.: 0.01 nm
Max.: 62 nm
- Linear encoder speed
Min.: 0 mm/s
Max.: 1,800 mm/s
- Process temperature
Min.: 10 °C
(50 °F)Max.: 30 °C
(86 °F)
Description
High-accuracy, reflective Laserscale with signal pitch of 250 nm. Ideal for low-profile stages, semiconductor back-end processing equipment and precision microscopes
Signal pitch : 250 nm
High accuracy : ±1 µm / 420 mm
High response speed : 1,800 mm/s
Maximum resolution : 3.8 pm
Available : with/without reference point
Completely non-contact design : Return error is theoretically eliminated.
Scale : ZERO glass / alkali-free glass
Thin head with thickness of 12 mm
Supporting various resolutions and output modes (Depending on an interpolator such as BD96 or BD700)
Special vacuum-compatible models available
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Other Magnescale Europe GmbH products
Linear encoder Laserscale
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*Prices are pre-tax. They exclude delivery charges and customs duties and do not include additional charges for installation or activation options. Prices are indicative only and may vary by country, with changes to the cost of raw materials and exchange rates.