X-ray spectrometer 2830 ZT

WDXRFlaboratorymeasurement

The 2830 ZT wavelength dispersive X-ray fluorescence (WDXRF) wafer analyzer offers the ultimate capability for measuring film thickness and composition. Designed specifically for the semiconductor and data storage industry, the 2830 ZT Wafer Analyzer enables the determination of layer composition, thickness, dopant levels and surface uniformity for a wide range of wafers up to 300 mm. The 4 kW SST-mAX X-ray tube features groundbreaking ZETA technology which drastically reduces the effects of X-ray tube aging. This ‘new tube’ performance is maintained throughout the tube’s lifetime, and together with high sensitivity, ZETA technology ensures that rapid analysis and short measurement times are upheld throughout the tube’s lifetime. ZETA technology robustly reduces the need for drift correction and recalibration, which increases productivity and uptime of the instrument. Maximized uptime Conventional X-ray tubes suffer tungsten evaporation, which causes deposits on the inside of the tube’s beryllium window. Instrumentation using such X-ray tubes requires regular drift correction to compensate for decreasing intensity, especially for light elements. Implementation of the SST-mAX Tube in the 2830 ZT solves this drift problem, thereby maximizing uptime and maintaining instrument precision over time. Easy to use The 2830 ZT is supplied with the advanced SuperQ software, which includes FP Multi, the software package specifically designed for multi-layer analysis. The software’s user interface ensures that even inexperienced operators can carry out fully automated fundamental parameter analysis of multi-layers.