AC/DC power supply HECD series

switchingdigitalbenchtop

series is a high voltage Amplifier power supply for electrostatic chucks. In addition to the polarity switching and forced grounding, the series offers the wafer monitoring system to satisfy wafer detection needs. Furthermore, with the wide range of voltages, this series can support both coulombic and Johnsen-Rahbek electrostatic chucks. Features and Benefits Reliability chucking/release status detection by wafer sensor Fast response by Amplifier architecture design (high reliability and long life by "non-relay polarity reverse" design.) "Two-channels independent control (option)" and "Center tap voltage setting (option)" for various chuck/release operation Equipped with digital interface of LAN, USB, RS-232C Built in low pass RF filter (13.56 MHz)