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Magnetron sputtering deposition machine PEROvap
thermal evaporationion beam-assistedthin-film

magnetron sputtering deposition machine
magnetron sputtering deposition machine
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Characteristics

Technology
magnetron sputtering, thermal evaporation, ion beam-assisted
Deposition type
thin-film
Other characteristics
vacuum
Applications
for the microelectronics industry, for photovoltaic applications

Description

Specially designed for Perovskites • Ideal tool for efficient R&D • Special system design • Special precursor source • High stability at low temperature • Stable and defined deposition process • High vacuum conditions • Low cross-talk • High repeatability • Material compatibility for a very long lifetime • Patent pending
*Prices are pre-tax. They exclude delivery charges and customs duties and do not include additional charges for installation or activation options. Prices are indicative only and may vary by country, with changes to the cost of raw materials and exchange rates.