Linear nanopositioning stage NPX series

piezoelectric3-axiscompact

The NPX Piezo Stack linear stages provide long travel and sub-nanometer resolution motion in one, two, or three axes all in a compact package. They feature rapid response and fast settling performance, allowing them to be used in dynamic processes such as high-frequency error compensation, tracking, fast stepping, or continuous scanning. •Sub-nanometer piezoelectric positioning resolution •Motion in X, XY, or XYZ •Piezoelectric travel range of up to 400 µm •Optional integrated strain-gauge for closed-loop operation •High resonant frequency for high dynamic applications •Vacuum versions Features Sub-Nanometer Positioning Resolution With positioning resolution as low as 0.2 nm, the NPX Piezo Stack linear stage make ultra-fine adjustments with resolution only limited by the noise of the control electronics. Large Piezoelectric Travel Range NPX Piezo Stack linear stages feature highly reliable, multi-layer, low-voltage piezoelectric transducer stacks for high-duty cycle operations. A sophisticated, FEA-optimized, parallelogram solid state flexure guide system ensures perfect parallel motion and up to 400 µm travel range. Due to the frictionless guide principle, NPX Piezo Stack linear stages are maintenance-free and are not subject to wear. Furthermore, the output motion sensitivity is not affected by mechanical friction.