Sub-nanometer displacement measurement interferometer interferoMETER 5600-DS

for distance measurementopticalwhite light

The white light interferometer IMS5600-DS is used for distance measurements with the highest precision. The controller offers a special calibration with intelligent evaluation and enables absolute measurements with subnanometer resolution. The interferometer is used for measurement tasks with the highest accuracy requirements, e.g., in electronics and semiconductor production. For vacuum applications, Micro-Epsilon offers special sensors, cables and feedthrough accessories. These sensors and cables are particle-free to a high degree and can even be used in UHV. The system provides absolute measurement values and can therefore also be used for distance measurement of step profiles. Thanks to the absolute measurement, steps are sampled with high signal stability. When measuring on moving objects, the differences in height of heels, steps and depressions can thus be reliably detected. The measuring system offers sub-nanometer resolution with a large offset distance in relation to the measuring range. With multi-peak distance measurement on transparent objects, up to 14 distance values are evaluated simultaneously. For example, the distance between glass and a carrier plate can be determined. The controller can then calculate the glass thickness from the distance values. IMS5600-DS interferometers can be used for measurement tasks in vacuum environments and clean rooms where the interferometers achieve a resolution in the subnanometer range.