SF6 gas sensor VKM2002985

micro-flow NDIRfor process measurementfor industrial gas safety monitoring

Sulphur hexafluoride is still indispensable in many applications as a trace, protective or insulating gas. Due to the high greenhouse effect of SF6, responsible handling of the gas is all the more important. The MicroFLOW SF6.100 Vol.-% sensor is suitable for a wide range of demanding applications that require precision and reliability. FIELDS OF APPLICATION Industry: SF6 is used in plasma etching processes to create precise patterns on semiconductor materials such as silicon, silicon dioxide and other compounds. The gas is used in special etching chambers where it is converted into a plasma by applying high-frequency energy. This plasma then reacts selectively with the material and enables the precise engraving or removal of materials in a very controlled and accurate process. In the production of aluminum, sulfur hexafluoride is used as a tracer gas to improve the efficiency of the production process and detect potential problems at an early stage. It is also used in this area to monitor the quality and consistency of the end product. Energy technology: In the field of electricity supply, SF6 is used as an insulating gas and cooling medium in high-voltage switchgear and transformers. The measurement of sulphur hexafluoride is important in order to identify leaks at an early stage and to monitor the condition of the systems. MEASUREMENT ACCURACY Our NDIR gas sensor achieves precise results when measuring and monitoring sulfur hexafluoride. With 10-point linearization, the maximum deviation of the measured gas concentration is less than one percent over the entire measuring range up to 100 percent by volume.