Semi-automatic probe station SPS-2 series
vacuum

Semi-automatic probe station - SPS-2 series - Microxact - vacuum
Semi-automatic probe station - SPS-2 series - Microxact - vacuum
Semi-automatic probe station - SPS-2 series - Microxact - vacuum - image - 2
Semi-automatic probe station - SPS-2 series - Microxact - vacuum - image - 3
Semi-automatic probe station - SPS-2 series - Microxact - vacuum - image - 4
Add to favorites
Compare this product
 

Characteristics

Type
semi-automatic, vacuum

Description

The SPS-2600-VAC and SPS-2800-VAC Series are MicroXact’s vacuum probe systems designed to support motorized or semi-automatic probing of up to 100mm or up to 200mm wafers in a vacuum or controlled gas atmosphere. This vacuum testing solution is systematic and precise, cost-efficient, low noise and convenient-to-use. These vacuum probe systems are built on a vibration-compensated, versatile platform capable of being configured to handle a wide range of probing applications. Ideal for icing-free testing down to 77K or for high temperature testing of devices and components that are prone to oxidation, MicroXact’s vacuum probe systems offer controlled environment wafer-level probing. Vacuum Probe Station Features • Available with standard repeatability/resolution (+/-7mm/1.5mm) and high repeatability/resolution (better than 2mm/100nm) in X & Y. • Available with manual or motorized theta stage. • Probe arms with external manual micromanipulator adjustment are available. • Available with liquid nitrogen-cooled thermal chucks for testing down to liquid nitrogen temperatures. • Standard configuration includes 7:1X zoom tube for better than 4 μm resolution. 12.5:1 and 16:1 zoom lenses are also available. High-resolution compound microscopes can be accommodated with special top lid design. • Efficient vibration isolation from vacuum pump vibrations. • XactTest™ automation software with addition of automated pressure control.

Catalogs

*Prices are pre-tax. They exclude delivery charges and customs duties and do not include additional charges for installation or activation options. Prices are indicative only and may vary by country, with changes to the cost of raw materials and exchange rates.