Semi-automatic probe station SPS-HS series

High-Speed Semi-Automated Systems • Motorized XY chuck, motorized platen in SPS-2600, motorized Z movement of the chuck in SPS 2800 in standard configuration. Motorized theta is an option. • Servo motor-based, linear encoders. • Very cost competitive, very fast, high productivity solution • Highly recommended for medium scale production or other applications where throughput is important Specifications • Wafer Size Up to 300mm • Motor type Servo motor • XY Stage Travel Up to 300mmx300mm • XY Stage Resolution, Repeatability Motorized, 0.15μm resolution, +/-1.2μm repeatability • XY Speed/ acceleration (max) Up to 1000mm/s, up to 35mm/s2 • Z Speed 20mm/s • Platen Travel 12.7mm or 25mm • Platen Adjustment Dual coarse and fine control with better than 2.5µm repeatability • Platen Planarity <12.7μm across 200mm • Platen Rigidity <50μm for 4.5kg • Vacuum Chuck Multi-zone vacuum • Chuck Flatness +/-13μm • Chuck Breakdown Voltage At least 500V • Chuck Isolation At least 1GΩ • Chuck Adjustment 360° coarse, +/-6° fine • Microscope High quality stereo zoom with up to 200mm working distance and magnification ranging from 3.5X to 180X • Feedthrough Terminals BNC, Triax or Banana plug • System Dimensions 101cm wide x91cm deep x 88cm high