Thermal mass flow controller GE250A
for gasanalog

Thermal mass flow controller - GE250A - MKS Instruments - for gas / analog
Thermal mass flow controller - GE250A - MKS Instruments - for gas / analog
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Characteristics

Technology
thermal mass
Fluid
for gas
Output
analog
Flow rate

Max.: 250 l/min
(66.04301 us gal/min)

Min.: 100 l/min
(26.41721 us gal/min)

Pressure

150 psi

Description

The GE250A mass flow controller is a general purpose, elastomer-sealed MFC suited for a wide variety of applications. The GE250A can be ranged from 100 to 250 slm (N2 equivalent). The GE250 is available with either analog I/O or digital I/O utilizing the latest control algorithms for fast and repeatable response to set point. Settling times of 1 to 2 seconds and setpoint accuracies below 1% of setpoint exceeds typical high flow mass flow controllers. Precise control is maintained down to 2% of the GE250A's configured Full Scale flow range. Multi-gas/multi-range capability and tight performance specifications for accuracy, control range, and transient response minimize flow controller inventory requirements. The multi-gas/multi-range feature and other custom controls are accessed through the embedded diagnostic interface. A standard Ethernet cable and JAVA-enabled HTML browser are the only tools needed. Critical gas parameters for typical high flow rate gases are already stored on the MFC. Configure an I-Series mass flow controller by selecting the gas from a drop-down menu and specify the desired Full Scale flow range. Perform routine device health checks, plot flow response, and store operating data for offline analysis with the I-Series MFC diagnostic interface.

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