- Hydraulics - Pneumatics
- Valve
- Mass flow regulator
- MKS Instruments
Thermal mass flow controller 1559Afor nitrogen
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Characteristics
- Technology
- thermal mass
- Fluid
- for nitrogen
- Flow rate
Min.: 20 l/min
(5.28344 us gal/min)Max.: 200 l/min
(52.83441 us gal/min)- Pressure
100 psi
Description
The MKS Instruments 1559 elastomer-sealed Mass Flow Controller is designed for general purpose mass flow control applications covering the range from 20 slm (42.5 cfh) to 200 slm (425 cfh). The 1559's unique control valve eliminates oscillation and offers better response time as compared to other flow controllers. This feature is possible through the use of a "balanced force" valve design that automatically neutralizes line pressure-induced imbalances within the control valve. The 1559A High Flow Mass Flow Controller's accuracy is ±1% of Full Scale.
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Flow Measurement, Control & Verification
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*Prices are pre-tax. They exclude delivery charges and customs duties and do not include additional charges for installation or activation options. Prices are indicative only and may vary by country, with changes to the cost of raw materials and exchange rates.