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Process gas analyzer
watergastrace

Process gas analyzer - MKS Instruments - water / gas / trace
Process gas analyzer - MKS Instruments - water / gas / trace
Process gas analyzer - MKS Instruments - water / gas / trace - image - 2
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Characteristics

Measured entity
process gas, water, gas
Measured value
trace
Configuration
portable

Description

The multi-gas analyzer, manufactured by MKS Intruments, is especially used for process gas. The device uses a fourier transform infrared (FTIR) and a nondispersive infrared (NDIR). The device is also capable of ppb to ppm sensitivity for gases such as NF3, NH3, H2, NO and N2O. It can also be used on gases with 30% water.

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Other MKS Instruments products

FTIR, NDIR Infrared Gas Analysis Instruments

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