Residual gas analyzer concentrationfor integration
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Characteristics
- Measured entity
- residual gas
- Measured value
- concentration
- Configuration
- for integration
Description
MKS' residual gas analyzers are made for general residual gas analysis. They are applicable for different residual gas analyzer applications involving accelerators, vacuum coatings and high energy physics. They are made to open up new possibilities for vacuum monitoring and e-diagnostics.
The residual gas analyzers are made to make vacuum troubleshooting and monitoring of chamber residual gases straightforward with an unprecedented range of instrument control options.
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Residual Gas Analysis/Mass Spectrometry
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*Prices are pre-tax. They exclude delivery charges and customs duties and do not include additional charges for installation or activation options. Prices are indicative only and may vary by country, with changes to the cost of raw materials and exchange rates.