Thermal mass flow controller 179A Mass-Flo®
for gas0-5 V

Thermal mass flow controller - 179A Mass-Flo®  - MKS Instruments - for gas / 0-5 V
Thermal mass flow controller - 179A Mass-Flo®  - MKS Instruments - for gas / 0-5 V
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Characteristics

Technology
thermal mass
Fluid
for gas
Output
0-5 V
Flow rate

Max.: 1,200 l/h
(317.00646 us gal/h)

Min.: 1 l/h
(0.26417 us gal/h)

Pressure

500 psi

Description

The 179A MASS-FLO® is an analog/digital, metal-sealed mass flow meter. It is made to measure the flow of gases in a wide range of applications. It is available in both analog and digital models with 1% accuracy. It is made up of 316L stainless steel finished less than 32 micro-inches Ra. The normal operating temperature range is from 0 °C up to 50 °C while its nominal operating pressure range from 10 to 20000 sccm 10 Torr . Its output signal ranges from 0 to 5 V DC.

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