- Hydraulics - Pneumatics
- Valve
- Mass flow regulator
- MKS Instruments
Thermal mass flow controller P2 MFCfor sour gasdigital
Add to favorites
Compare this product
Characteristics
- Technology
- thermal mass
- Fluid
- for sour gas
- Other characteristics
- digital
- Flow rate
Max.: 1 l/h
(0.26417 us gal/h)Min.: 0 l/h
(0 us gal/h)- Pressure
Max.: 1,200 Torr
(23.2 psi)Min.: 4 Torr
(0.1 psi)
Description
The PFC-60 ΠMFC, manufactured by MKS Instruments, is a digital thermal mass flow controller especially used for corrosive gases. The device consist of improvement in the technology in terms of functionality and performance. They help the users in semiconductor and high purity thin-film applications. The flow control of the device is insensitive to upstream and downstream disturbances. The real-time control of the gas flow and its accuracy is improved. They have better chamber matching than PID based digital MFCs. The pressure sensor and LED display is combined in order to lessen the components needed in a gas stick. The set-up and troubleshooting of the MFC's in-situ is due to the web based browser interface.
Catalogs
No catalogs are available for this product.
See all of MKS Instruments‘s catalogsOther MKS Instruments products
Flow Measurement, Control & Verification
Related Searches
- Valve
- Ball valve
- Pneumatic valve
- Regulating valve
- Stop valve
- Electric valve
- Biogas valve
- Pneumatically-operated valve
- Butterfly valve
- Piston actuator valve
- Flow controller
- Pneumatic flow controller
- Isolation valve
- Gas flow controller
- Pressure-control valve
- Mass flow controller
- Digital flow controller
- Servo-driven valve
- Nitrogen flow controller
- Two-stage valve
*Prices are pre-tax. They exclude delivery charges and customs duties and do not include additional charges for installation or activation options. Prices are indicative only and may vary by country, with changes to the cost of raw materials and exchange rates.