Mott GasShield® Surface Mount Filters offer top-of-the-line 0.0015 μm filtration capabilities in integrated gas systems employed in semiconductor OEM tools. These GasShield® Surface Mount Filters are designed to fit seamlessly into the 1.125” and 1.5” four-fastener, surface-mount gas distribution systems, featuring both C-seal and W-seal configurations. They are compatible with a wide range of inert gases as well as most specialty gases.