Hexapod positioning stage HEX-S6.50.200
XYZrotarymotorized

hexapod positioning stage
hexapod positioning stage
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Characteristics

Orientation
XYZ, rotary
Type
motorized, hexapod
Number of axes
6-axis
Other characteristics
precision, compact, for wafer handling, with built-in stepper motor
Speed

15 mm/s, 100 mm/s

Load

750 kg
(1,653.47 lb)

Description

HEX-S6.50.200 6-Axis Hexapod Tri-pod structer Parallel six degrees of freedom stages Short Description: Features: High precision, can be assembled, can be customized, light aperture 460mm Delivers consistent and reliable motion accuracy in a compact and rugged stage It has ultra-fine positioning resolution and sufficient payload capability Ideal for applications requiring complex multi-degree of freedom motion when available space is limited. It is suitable for the leveling of semiconductor test wafer. Application scenario of optical inspection, large hollow aperture adjustment optical path.

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*Prices are pre-tax. They exclude delivery charges and customs duties and do not include additional charges for installation or activation options. Prices are indicative only and may vary by country, with changes to the cost of raw materials and exchange rates.