XYZ stage E-LMT-XYZ
verticallinear servo-motorvoice coil

XYZ stage
XYZ stage
XYZ stage
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Characteristics

Orientation
XYZ, vertical
Type
linear servo-motor, voice coil
Stroke

20 mm, 200 mm
(0.787 in, 7.874 in)

Speed

30 mm/s, 500 mm/s

Repeatability

0.3 µm

Load

5 kg
(11.02 lb)

Description

Elevation Stage with Excellent Straightness and Flatness of Motion The vertical stage platform design provides excellent straightness and flatness, with better pitch and yaw performance compared to vertically mounted linear positioning stages, where the cantilevered load can cause deflections in the supporting linear bearings. High Resolution Linear Motion with voice Servo MotorsE-ABVT-Z is internally driven by a voice coil motor, equipped with an air-floating transfer rail (cross ball guide rails can also be used), and uses a high-resolution grating to close the loop, and is equipped with a high-performance driver to ensure the minimum displacement and repeatability of the positioning stage. achieve great performance. Computer Control, Software, Programming

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