Desktop stage MiniSCAN

linearXYZ-axis

iniSCAN series MiniSCAN series is a high-precision desktop scanning system recently launched by our company. The whole machine adopts a marble base with excellent stability, equipped with high-precision XY and Z-axis motion stages, and has reserved light path installation and lighting. The mechanism can be very quickly combined into various applications that meet customer requirements. Currently, it has very successful application cases in high-precision applications such as semiconductor wafer scanning, biological detection, and interferometer measurement. Main features of MiniSCAN series Standard desktop-level vibration isolation system Three-axis optional high-precision linear motor or high-stability stepper motor motion stage The drive control system has been embedded in the entire machine structure, no additional control box is required Customized lighting and imaging mechanisms can be selected according to customer requirements Optional high-precision ranging module to achieve 0.2um level autofocus Optional standard control software, as well as a complete, rich and fast secondary development package