● Travel ranges to 200mm to 600 mm
● Load capacity 25 kg
● Air-Bearing Design
● features a smaller cross-section than typical air-bearing stages without sacrificing load capability. The large air-bearing surfaces provide excellent stiffness, allowing for heavy loading. Proprietary manufacturing
● techniques result in a stage with unsurpassed pitch, roll and yaw characteristics.
The driving force behind this stage is Precision-stage brushless linear servomotor. The utilizes an ironless forcer, which means there is zero cogging and no attractive forces – resulting in unrivaled smoothness of motion. Since the stage is friction-free and the motor has zero cogging, extremely fine resolutions are achievable.
The noncontact air bearing, noncontact linear motor drive and noncontact feedback device ensure years of maintenance-free operation at the high performance levels that are expected of equipment. Because there is no mechanical contact between moving elements, the E-EC-ABL-X experiences no wear or reduction in performance over time. Service life is virtually unlimited, and since there is no lubrication – only clean, dry gas – air bearings are ideal for clean room and medical applications.
positioning systems are ideally suited for many high-precision applications such as metrology, photonics, and precision scanning in semiconductor or flat panel display manufacturing.
Thanks to the friction-free motion, no particles are formed, which makes stages ideal for cleanroom applications.