Linear positioning stage ABW400 series

XYverticalmotorized

● Ideal for scanning applications or high-precision positioning ● Cleanroom compatible ● Size of the motion platform 400 mm × 138 mm ● Travel ranges 200 mm to 1000 mm ● Resolution to 5 nm The stages are equipped with a servo drive linear motor with preloaded air bearings and integrated linear encoder. The combination of these noncontact components results in a frictionless motion platform that offers the highest performance, quality, and lifetime. A high-force linear motor can drive the stage to top speed within a few milliseconds, and the high-capacity bearings can support payloads up to 20 kg. The laterally opposed, actively preloaded air bearing design in this model allows mounting in any orientation. ● Encoder ● Filter and Air Preparation Kits ● Single and multi-axis motion controller ● XY setups and individual configurations ● Cable track variations ● Options with counterweight for vertical (Z) orientation ● Customizations available ● Base plates made of granite and systems for reducing vibration positioning systems are ideally suited for many high-precision applications such as metrology, photonics, and precision scanning in semiconductor or flat panel display manufacturing. Thanks to the friction-free motion, no particles are formed, which makes stages ideal for cleanroom applications.