● Cleanroom compatible
● Motion platform diameter from 100 mm to 300 mm
● Eccentricity and flatness < 100 nm
● Can be mounted vertically or horizontally
● Design Features
● Delivers best-in-class rotational motion, helping you to optimize your high-precision process
● Minimizes axial-, radial-, and tilt-error motions, reducing the need for extensive post-processing of parts and measurement data
● Provides generous load-carrying capacity without compromising on motion quality
● Integrates easily into precision systems and machines due to compact, lightweight form factor, as well as horizontal and vertical mounting and load-carrying capabilities
● Key Applications
● E-3R-NG stages are ideal for high-precision applications, including:
● Surface metrology, including the measurement of roundness, flatness, and form error
● Micro- and nanotomography
● Beamline and synchrotron research
● Precision manufacturing, including diamond turning, grinding and other high-performance machine tool applications
● Optical alignment, inspection and calibration systems
● Engineered for Precision
● The E-ABR100 series is meticulously engineered to consistently satisfy even the most stringent performance requirements. At its core is an industry-leading, air-bearing technology that delivers nanometer-level error motion performance with high stiffness and load-carrying capabilities.
● Simple, Straightforward Integration