Linear positioning stage ABL250 series
motorizedprecisionair bearing

linear positioning stage
linear positioning stage
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Characteristics

Orientation
linear
Type
motorized
Other characteristics
precision, air bearing
Speed

2 m/s
(6.56 ft/s)

Repeatability

50 nm, 100 nm, 150 nm, 200 nm, 250 nm

Load

20 kg
(44.09 lb)

Description

● Ideal for scanning applications or high-precision positioning ● Cleanroom compatible ● Size of the motion platform 250 mm × 90 mm ● Travel ranges to 100mm to 600 mm ● Load capacity to 200 N ● Air-Bearing Design ● the E-EC-ABL-X ● features a smaller cross-section than typical air-bearing stages without sacrificing load capability. The large air-bearing surfaces provide excellent stiffness, allowing for heavy loading. Proprietary manufacturing ● techniques result in a stage with unsurpassed pitch, roll and yaw characteristics. The driving force behind this stage is Precision-stage brushless linear servomotor. The utilizes an ironless forcer, which means there is zero cogging and no attractive forces – resulting in unrivaled smoothness of motion. Since the stage is friction-free and the motor has zero cogging, extremely fine resolutions are achievable. The noncontact air bearing, noncontact linear motor drive and noncontact feedback device ensure years of maintenance-free operation at the high performance levels that are expected of equipment. Because there is no mechanical contact between moving elements, the E-EC-ABL-X experiences no wear or reduction in performance over time. Service life is virtually unlimited, and since there is no lubrication – only clean, dry gas – air bearings are ideal for clean room and medical applications. positioning systems are ideally suited for many high-precision applications such as metrology, photonics, and precision scanning in semiconductor or flat panel display manufacturing.

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