Tilt positioning stage E-ABT-XY-360X360

linearXYpiezo

E-ABT-XY-360X360 (Ceramic linear motor stage) XY Air bearing Linear Motor Stage Short Description: The ceramic version uses high-purity alumina as the air-floating structure and guide elements. Compared with granite and metal, alumina ceramics have a smaller expansion coefficient, and the advantages of Straightness, hardness, and wear resistance. ● Ideal for scanning applications or high-precision positioning ● Cleanroom compatible ● Travel ranges to 360 mm × 360 mm ● Load capacity to 500 N ● Resolution to 4.88nm or 1 nm, Velocity to 500mm/s ● Incremental encoder or Absolute encoder ● Alumina ceramic versions are available, a material that offers the highest precision and performance, but at a higher price. ● Filter and Air Preparation Kits ● Additional axes ● Machine bases ● Base plates made of granite and systems for reducing vibration ● Suitable mounts for additional positioners such as tip/tilt platforms or 6-axis positioners with piezo drives Positioning systems are ideally suited for many high-precision applications, such as metrology, photonics, and precision scanning as well as in semiconductor or flat panel display manufacturing. Long lifetime, cleanroom compatible drag chains The E-ABT-XY-360X360 has high-quality, long-lasting ribbon cables and pneumatic hoses. Extensive research and development has resulted in an optimized cable management system that enables millions of maintenance-free cycles. Teflon coating ensures low particle formation Thanks to the friction-free motion, no particles are formed, which makes PIglide stages ideal for cleanroom applications.