E-ART160 Air bearing rotary stage Rotation Stage with Air Bearings
Short Description:
● Cleanroom compatible
● Motion platform diameter 180mm to 300 mm
● Load capacity to 650N
● Eccentricity and flatness < 100 nm
● Can be mounted vertically or horizontally direct-drive, rotary air-bearing stages
● Analog and digital position feedback
Delivers best-in-class rotational motion, helping you to optimize your high-precision process Minimizes axial-, radial-, and tilt-error motions, reducing the need for extensive post-processing of parts and measurement data
Offers excellent positioning performance and velocity stability with high-resolution feedback Features a novel, non-influencing motor design that contributes to ultra-precise motion performance Provides generous load-carrying capacity without compromising on motion quality Integrates easily into precision systems and machines due to compact, lightweight form factor, as well as horizontal and vertical mounting and load-carrying capabilities
The E-ART160 of motorized rotation stages are designed for accuracy, precision, high stiffness, and ease of use, and can be mounted in any orientation.
Various options can be combined to create a solution ideal for point-to-point indexing or constant velocity scanning.
The E-ART160 stages offer superior travel accuracy, flatness, and wobble performance. Because they are friction free and require no maintenance or lubrication, they are ideal for use in cleanrooms.
● torque motor
● Brushless
● Slotless
● Low cogging torque
● Accessories and options
● Analog and digital position feedback Absolute encoder (optional)