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  1. Power Transmission - Mechanical components
  2. Actuator and Positioning System
  3. Linear positioning stage
  4. NATSU PRECISION TRADE LIMITED

Hexapod positioning stage E-HEX-10.6.100
linearrotarylinear motor-driven

hexapod positioning stage
hexapod positioning stage
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Characteristics

Orientation
linear, rotary
Type
piezo, linear motor-driven, linear servo-motor, manually-operated, hexapod
Number of axes
6-axis
Other characteristics
high-accuracy, compact, for microscopes, vacuum-compatible, direct-drive, ball bearing, with position indicator
Stroke

50 mm
(1.969 in)

Speed

100 m/s
(328.08 ft/s)

Repeatability

0.2 µm

Load

10 kg
(22.05 lb)

Description

6-Axis Hexapod Tri-pod structer E-HEX-10.6.100.100-XXX Series Parallel six degrees of freedom stages Short Description: Features: High precision, can be assembled, can be customized, light aperture 460mm Delivers consistent and reliable motion accuracy in a compact and rugged stage It has ultra-fine positioning resolution and sufficient payload capability Ideal for applications requiring complex multi-degree of freedom motion when available space is limited. It is suitable for the leveling of semiconductor test wafer. Application scenario of optical inspection, large hollow aperture adjustment optical path.

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*Prices are pre-tax. They exclude delivery charges and customs duties and do not include additional charges for installation or activation options. Prices are indicative only and may vary by country, with changes to the cost of raw materials and exchange rates.
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