MOHS is an Oldham-type flexible coupling.
The spacer is made of an engineering plastic VESPEL SPC5000, which is superior in heat resistance and chemical resistance, and the amount of outgas at high temperature is very low.
Slippage of hubs and a spacer allows eccentricity and angular misalignment to be accepted.
The load on the shaft generated by misalignment is small and the burden on the shaft is reduced.
Allowable Operating Temperature is -20℃ to 200℃.
Cleanroom wash/cleanroom packing provided as standard.
It can be used in an environment or cleanroom where heat resistance and chemical resistance are required, such as FPD manufacturing equipment.
Application
FPD manufacturing device / Semiconductor manufacturing device
Please feel free to contact us for a quotation.