Volume flow sensor FUS21

airin-linewith integrated digital display

Capable of flow management and confirmation of adsorption of small workpieces. Built-in needle valve type High accuracy: ±3% F.S. or less. Accurate flow measurement is possible. High speed response: 50msec or less. High speed response is achieved by using a platinum sensor chip that applies silicone micromachining. Contributes to shorter tact time. Needle valve integrated type is also available. A flow-adjustable needle valve is integrated with the sensor, eliminating the piping. Space-saving installation is also possible. Bidirectional fluid measurement is possible. The bidirectional type allows measurement in any flow direction. This increases the degree of flexibility in piping installation and can also be used for backflow detection. More user-friendly display function. Display inversion function makes it easy to read even when the installation orientation is upside down. Twin display/two-color display function improves operability. Operability is improved with the main screen and sub-screen. Furthermore, the two-color display makes it easy to identify abnormalities at a glance. Compatible with various mounting methods. Bracket mounting, panel mounting, and DIN rail mounting options are available. No need for a straight pipe section. No straight pipe section is required on both the upstream and downstream sides. Abundant connection variations. Inch sizes available as standard. Equipped with a setting duplication function. Settings on the master side can be copied to the other side. Compatible with 5 types of gases. Equipped with gas type switching function.