Semi-automatic mask aligner Model 800MBA

The OAI Model 800 Series Mask Aligners are versatile optical 2 camera front side mask aligners or 4 camera backside mask aligners that deliver ultra-precise (1µm-2µm) alignment accuracy and at an extremely competitive price. These Mask Aligner can be configured with a wide variety of OAI light sources that range in power up to 2KW. The mask aligner tooling can accommodate substrates up to 8-inch square, and the wafer chuck is positioned to allow for easy loading and unloading. The model 800 MBA for backside alignment features motorized backside focus, motorized auto leveling and auto gap setting. Built on a vibration isolation platform, the fixed mask holder assembly guarantees alignment accuracy and repeatability. Operation is simplified using the easy-to-read, PLC touch-screen. Training time is short; an operator can learn to use the mask aligner effectively in less than one hour. The Model 800 is used in the Semiconductor, Packaging, MEMS, Sensors, IOT, Microfluidics and NIL industries.