The leading equipment for professional use in 200 and 300 mm wafer processing in semicunductor technology. SURFTENS WH 300 is equipped with a 3 axis wafer roboter, wafer scanner, loadport for 200 and/or 300 mm wafers, fan filter unit, notching system. Suitable for any cleanroom class it features the automatic mapping of contact angles on wafers for up to 25 wafers.
SURFTENS WH 300 is a fully automatic contact angle measuring instrument, equipped with wafer handling robot, loadport for 200mm/300mm wafers and complete functionality as requesetd in 300mm wafer technology.