Wafer inspection machine AWX FSI

particleindustrialdefect

The AWX FSI system is essential for wafer manufacturers to provide quick particle monitoring of critical process tools. Product Overview Unpatterned wafers require the quality control provided by the AWX FSI system, with laser darkfield inspection to detect particles, scratches, area defects and micro roughness (haze) on bare wafers. The AWX FSI system is capable of measuring different wafer substrates, materials, and sizes including bare silicon and doped or coated wafers. The automated handling of different open cassette types and a pre-aligner allows wide flexibility for using this tool in various environments from R&D, production and quality assurance. The AWX inspection tool can handle 150mm, 200mm and 300mm wafers enabling automatic wafer sorting based on inspection results. Specifications • 150/200/300mm automated wafer inspection • Sensitivity to nanometer levels • Haze • Sorting capability • Flexible tool configuration • Automatic defect classification