Lithography system for the semiconductor industry JetStep® G35

Designed for flexibility, the JetStep® G35 System utilizes a family of high performance projection lenses to enable high-resolution imaging for flat panel display manufacturers. Product Overview The Jetstep G35 system is a high volume manufacturing imaging system for up to Gen 3.5 displays. The JetStep G35 system enables high resolution imaging down to 1.5µm combined with registration and stitching accuracy required by most advanced manufacturing of high resolution displays. Applications • LCD • TFT • AMOLED • Micro-LED Specifications • High-fidelity projection lens and illumination system for resolution to 1.5µm • Industry standard 6-inch reticle format for cost efficient manufacturing • Automated magnification control increased process window • On board reticle management system to provide maximum utilization • On board metrology package for insitu calibration • On the fly autofocus at every exposure site to automatically adjust focus over panel topology • On board diagnostics that provide feedback on system performance and troubleshooting