Compact batch modules suitable for trail and small-scale production.
VS2 is equipped with convenient automated load/unload unit.
1. Formic acid reduction
In comparison with hydrogen, formic acid has excellent reduction effect
at low temperature. Application of formic acid removes surface oxide and obtains excellent wettability.
2. IR heater
Origin’s system adopts the directly heated by IR heater, to achieve a high-speed heating.
In contrast, typical hot plate is not suitable for high-speed heating, since the heat capacity of itself is large, and also there is large thermal resistance between the works under vacuum condition.