- Hydraulics - Pneumatics
- Pump
- Turbomolecular vacuum pump
- Pfeiffer Vacuum+Fab Solutions
Turbomolecular vacuum pump ATH 1600 M seriesoil-freesingle-stage
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Characteristics
- Technology
- turbomolecular
- Lubrication
- oil-free
- Number of stages
- single-stage
- Flow rate
Min.: 0 l/s
(0 us gal/s)Max.: 1,400 l/s
(369.84 us gal/s)
Description
5-axis magnetically levitated turbopump with drag stage for a pump speed of up to 1400 l/s for N2
Product description
• - Operation with integrated OBC drive electronics or Magpower external drive electronics
• - Installation in any orientation
• - Water cooled
• - CE marked and ROHS compliant
• - Heated version (MT) available for corrosive applications.
• - ATH-M is compact turbomolecular pumps in world reference in semiconductor and coating industry. World wide large installation base in light process to harsh process for DN200 and DN250 flange size.
Catalogs
No catalogs are available for this product.
See all of Pfeiffer Vacuum+Fab Solutions‘s catalogsExhibitions
Meet this supplier at the following exhibition(s):
Hyvolution 2025
28-30 Jan 2025 paris (France) Stand 4S28
Other Pfeiffer Vacuum+Fab Solutions products
Turbopumps
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*Prices are pre-tax. They exclude delivery charges and customs duties and do not include additional charges for installation or activation options. Prices are indicative only and may vary by country, with changes to the cost of raw materials and exchange rates.