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Turbomolecular vacuum pump ATH 1600 M series
oil-freesingle-stage

turbomolecular vacuum pump
turbomolecular vacuum pump
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Characteristics

Technology
turbomolecular
Lubrication
oil-free
Number of stages
single-stage
Flow rate

Min.: 0 l/s
(0 us gal/s)

Max.: 1,400 l/s
(369.84 us gal/s)

Description

5-axis magnetically levitated turbopump with drag stage for a pump speed of up to 1400 l/s for N2 Product description • - Operation with integrated OBC drive electronics or Magpower external drive electronics • - Installation in any orientation • - Water cooled • - CE marked and ROHS compliant • - Heated version (MT) available for corrosive applications. • - ATH-M is compact turbomolecular pumps in world reference in semiconductor and coating industry. World wide large installation base in light process to harsh process for DN200 and DN250 flange size.

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Turbopumps

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*Prices are pre-tax. They exclude delivery charges and customs duties and do not include additional charges for installation or activation options. Prices are indicative only and may vary by country, with changes to the cost of raw materials and exchange rates.
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