Roots vacuum pump A 200 L

multi-stagecompacthigh-performance

Based on A 100 L design, A 200 L meets higher pumping capacity as well as very high pumping cycles. The pump does not require any on-site preventive maintenance and equals A 100 L reliability, with a MTBF of more than 195,000 hours. Applications • - Load lock chamber and transfer chamber in semiconductor industry • - Load lock and sputtering chamber in solar photovoltaic applications • - Cryogenic applications and use in fundamental research laboratories • - Industry (cryogenic, gas manufacturers, laser sources) Customer value • - High performance • - Reliable • - Energy Efficient • - Compact • - Stackable • - Low vibration and noise level • - Plug and play system: integrated monitoring • - Optional RS-232/RS-485 interface Product description • - High pumping cycle frequency of small load lock • - High pumping speed 200 m3/h