• Travel range 100 µm, 400 µm, or 800 µm
• Significantly faster response and longer lifetime than motorized drives
• Fine positioning of objectives with sub-nm resolution
• Direct position measuring with capacitive sensors: Highest linearity
• Compatible with Metamorph® imaging software
• Large clear aperture with Ø 29 mm
• 3D imaging
• Screening
• Interferometry
• Measuring technology
• Autofocus systems
• Biotechnology
• Semiconductor inspection
Outstanding lifetime due to PICMA® piezo actuators
The PICMA® piezo actuators are all-ceramic insulated. This protects them against humidity and failure resulting from an increase in leakage current. PICMA® actuators offer an up to ten times longer lifetime than conventional polymer-insulated actuators. 100 billion cycles without a single failure are proven.
Subnanometer resolution with capacitive sensors
Capacitive sensors measure with subnanometer resolution without contacting. They guarantee excellent linearity of motion, long-term stability, and a bandwidth in the kHz range.
High guiding accuracy due to zero-play flexure guides
Flexure guides are free of maintenance, friction, and wear, and do not require lubrication. Their stiffness allows high load capacity and they are insensitive to shock and vibration. They work in a wide temperature range.