• Integrated linear encoder for maximum accuracy with 0.1 µm resolution
• Minimum incremental motion 0.2 µm
• Recirculating ball screw provides high velocity and long lifetime Highly accurate position measuring with incremental linear encoder
Noncontact optical linear encoders measure the position directly at the platform with the greatest accuracy. Nonlinearity, mechanical play or elastic deformation have no influence on the measurement.
Application fields
Optical alignment. Precision automation.