Air bearing stage A-121 PIglide AT1 series
linearlinear motor-drivenhigh-accuracy

Air bearing stage - A-121 PIglide AT1 series - Physik Instrumente - linear / linear motor-driven / high-accuracy
Air bearing stage - A-121 PIglide AT1 series - Physik Instrumente - linear / linear motor-driven / high-accuracy
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Characteristics

Orientation
linear
Type
linear motor-driven
Other characteristics
high-accuracy, dovetail, air bearing
Stroke

Min.: 50 mm
(1.969 in)

Max.: 350 mm
(13.78 in)

Speed

1 m/s
(3.28 ft/s)

Repeatability

0.25 µm

Description

• Ideal for scanning applications or high-precision positioning • Cleanroom compatible • Size of the motion platform 115 mm × 115 mm • Low profile from 60 mm • Resolution to 1 nm The stages in the PIglide are equipped with a servo drive linear motor with preloaded air bearings and integrated linear encoder. The combination of these noncontact components results in a frictionless motion platform that offers the highest performance, quality, and lifetime. A high-force linear motor can drive the stage to top speed within a few milliseconds. The preloaded air bearing construction supports mounting in any orientation. Application fields PIglide positioning systems are ideally suited for many high-precision applications such as metrology, photonics, and precision scanning in semiconductor or flat panel display manufacturing. Thanks to the friction-free motion, no particles are formed, which makes PIglide stages ideal for cleanroom applications.
*Prices are pre-tax. They exclude delivery charges and customs duties and do not include additional charges for installation or activation options. Prices are indicative only and may vary by country, with changes to the cost of raw materials and exchange rates.