Rotary positioning stage A-63x PIglide RL series

motorizedmulti-axisprecision

• 200 mm or 300 mm motion platform diameter • Low profile, 60 mm • Eccentricity and flatness < 100 nm • Option for self-locking at rest by magnetic preload The directly driven low-profile rotation stages of the PIglide RL series are designed for the highest precision with low-profile design.Various options can be combined to create a solution ideal for point-to-point indexing or constant velocity scanning.The RL stages offer superior travel accuracy, flatness, and wobble performance. 3-phase torque motor • Brushless • Slotless • Low cogging torque Absolute encoder (optional) Absolute encoders supply explicit position information that enables immediate determination of the position. This means that referencing is not required during switch-on, which increases efficiency and safety during operation. Accessories and options • Incremental or absolute encoder • Vacuum feedthrough • Self-locking at rest by magnetic preload • PIglide filter and air preparation kit • Single or multi-axis motion controllers and servo drives • Multi-axis/customized designs • Base plates made of granite and systems for reducing vibration Application fields Optical alignment, wafer inspection, wafer alignment, measuring technology, inspection systems, calibration, scanning.